Mobility for High Effective Field in Double-Gate and Single-Gate SOI for Different Substrate Orientations

نویسندگان

  • Viktor Sverdlov
  • Enzo Ungersboeck
  • Hans Kosina
چکیده

1. Abstract Low-field mobilities for (100) and (110) substrate orientations in single-gate (SG) and double-gate (DG) operation modes are compared. It is argued that for the same gate voltage twice as high carrier concentration in DG ultra-thin body (UTB) SOI as compared to the SG mode leads to a higher relative occupation of primed subband ladder for (100) substrate orientation. Efficient scattering in primed subbands overpowers the mobility enhancement due to the volume inversion in DG and leads to a lower DG mobility at high effective fields as compared to that for SG UTB SOI.

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تاریخ انتشار 2006